Electrostatic Actuator with Segmented Comb Electrodes
نویسندگان
چکیده
منابع مشابه
Self-assembly technique for MEMS vertical comb electrostatic actuator
We report a very simple and reliable method for making Self-Assembled Vertical Comb (SAVC) drive actuators by using the standard SOI bulk micro-machining processes. The initial angular offset of the movable combs is prepared by using the process stiction which occurs during drying process after sacrificial release. The optical scanner integrated with SAVC has shown good electrostatic scanning p...
متن کاملExtending the traveling range with a cascade electrostatic comb-drive actuator
Electrostatic comb-drive actuators have been developed and employed for many applications. However, side stability (side pull-in) limits the actuator stroke constraining its applications. Hence, extending the stable traveling range is an important issue for designing electrostatic comb-drive actuators. This study presents a novel cascade electrostatic comb-drive actuator. Instead of shifting th...
متن کاملElectrostatic-comb Drive of Lateral Polysilicon Resonators
This paper mvestlgates the elcctrostatlc dnve and sense of polynhcon resonators parallel to the substrate, using an mterdlgtated capacitor (electrostatic comb) Three expenmental methods are used nucroscoplc observation mth contmuous or stroboscopic iummatlon, capacltlve sensing using an amphtude-modulation technique and SEM observation The mtnnslc quality factor of the phosphorus-doped low-pres...
متن کاملReduction of Electrostatic Control Voltage with a Tri - Electrode Actuator †
We present a new tri-electrode topology for reducing the control voltage for electrostatic actuators. Conventional parallel plate actuators are dual-electrode systems, formed by the MEMS structure and the drive electrode. By placing a perforated intermediate electrode between these elements, a tri-electrode configuration is formed. This topology enables a low voltage on the intermediate electro...
متن کاملModeling of a High Force Density Fishbone Shaped Electrostatic Comb Drive Microactuator
This paper presents the design and evaluation of a high force density fishbone shaped electrostatic comb drive actuator. This comb drive actuator has a branched structure similar to a fishbone, which is intended to increase the capacitance of the electrodes and hence increase the electrostatic actuation force. Two-dimensional finite element analysis was used to simulate the motion of the fishbo...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: IEEJ Transactions on Sensors and Micromachines
سال: 2006
ISSN: 1341-8939,1347-5525
DOI: 10.1541/ieejsmas.126.168